Excimer UV 系统
Take full advantage of our unique high-energy UV excimer lasers with complete optical systems configured for LTPS, LLO, 电梯, 骑士, 介绍, 和更多的.
- Vertical Integration Avoid risk and enjoy 24/7 operation with our long-lived lasers, optics and mechanics.
- Proven Industrial Tools Rely on the same enabling technology that makes high-performance mobile displays.
- UV Wavelength Options Choose from 193, 248, and 308 nm systems, plus custom 157 or 351 nm options.
Bringing Our Expertise to Your Process
With 50 years of experience in UV lasers and optical systems, we understand the challenges of managing, shaping and focusing excimer beams. And thanks to vertical integration, 我们设计, 制造, and assemble complete systems to the most exacting standards.
Excimer UV Family of 产品
||3-in-1 Value - Single system for all three processes.||High Throughput - High energy excimer laser supports large field sizes.||Future-Proof - Handles die sizes from 50 down to 5 µm.|
||Long Line Beam - Up to 1500 mm.||High Homogeneity - 0.6 % (2σ).||Large Focal Depth - Up to ±150 µm.|
||High Homogeneity - 1.8 %||Large Focal Depth - Up to ±200 µm.||High Pulse Energy - Up to 2000 mJ.|
||Homogenize a Beam - <± 5% fluence variation.||Variable Attenuation - Precise energy control.||Mask Image Projection - 4-10X demagnification.|
||High Energy Density - Up to 7.²5 J /厘米.||Versatile and Adjustable - Line or square profile.||High Optical Resolution - ≥ 5 µm.|
||High Optical Resolution - 1 µm.||Variable Sample Spot - 2 - 160 µm.||High Pulse Stability - 1 % (rms) .|